Silica deposition by excimer-laser-induced chemical vapour deposition in perpendicular configuration
Betty León, Armin Klumpp, Pío González, Eduardo G. Parada, Dolores Fernández, Juan Pou, Julia Serra, Hermann Sigmund, Mariano Pérez-AmorVolume:
6
Année:
1996
Langue:
english
Pages:
10
DOI:
10.1002/(sici)1099-0712(199603)6:23.0.co;2-p
Fichier:
PDF, 781 KB
english, 1996