Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 07 Vol. 38; Iss. 4
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Dielectric breakdown in epitaxial BaTiO 3 thin films
Wu, HsinWei, Ponath, Patrick, Lin, Edward L., Wallace, Robert M., Young, Chadwin, Ekerdt, John G., Demkov, Alexander A., McCartney, Martha R., Smith, David J.Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000237
Date:
July, 2020
Fichier:
PDF, 1.97 MB
2020