
Plasma Sprayed Coatings of High-Purity Ceramics for Semiconductor and Flat-Panel-Display Production Equipment
Junya Kitamura, Hiroyuki Ibe, Fumi Yuasa, Hiroaki MizunoVolume:
17
Langue:
english
Pages:
9
DOI:
10.1007/s11666-008-9285-y
Date:
December, 2008
Fichier:
PDF, 843 KB
english, 2008