
The electrical and physical analysis of Pt gate/Al2O3/p-Si (100) with dual high-k gate oxide thickness for deep submicron complementary metal-oxide-semiconductor device with low power and high reliability
Chihoon Lee, Sang Yong No, Da Il Eom, Cheol Seong Hwang, Hyeong Joon KimVolume:
34
Année:
2005
Langue:
english
Pages:
6
DOI:
10.1007/s11664-005-0237-8
Fichier:
PDF, 186 KB
english, 2005