Catalyst-Free Growth of Two-Dimensional BCxN on Dielectrics by Temperature-Dependent Plasma-Enhanced Chemical Vapor Deposition
Yi, Kongyang, Jin, Zhepeng, Bu, Saiyu, Wang, Dingguan, Liu, Donghua, Huang, Yamin, Dong, Yemin, Yuan, Qinghong, Liu, Yunqi, Wee, Andrew T. S., Wei, DachengJournal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.0c08555
Date:
June, 2020
Fichier:
PDF, 1.05 MB
2020
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