Experimental optimization of post metal annealing on fully depleted-silicon on insulator tunneling field effect transistor
Song, Hyun-Dong, Song, Hyeong-Sub, Eadi, Sunil Babu, Choi, Hyun-Woong, Shin, Hyun-Jin, Lee, Jea Woo, Yang, Ji-Woon, Lee, Hi-DeokVolume:
59
Journal:
Japanese Journal of Applied Physics
DOI:
10.35848/1347-4065/ab8e1c
Date:
July, 2020
Fichier:
PDF, 1.66 MB
2020