Optical, structural and electrical characterization of pure ZnO films grown on p-type Si substrates by radiofrequency magnetron sputtering in different atmospheres
Melnichuk, O., Melnichuk, L., Venger, Ye, Guillaume, C., Chauvat, Marie-Pierre, Portier, Xavier, Markevich, I., Korsunska, N O, Khomenkova, LarysaJournal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab9397
Date:
May, 2020
Fichier:
PDF, 1.09 MB
2020
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