Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy
Fathy, Alaa, Sabry, Yasser M., Gnambodoe-Capochichi, Martine, Marty, Frederic, Khalil, Diaa, Bourouina, TarikVolume:
11
Journal:
Micromachines
DOI:
10.3390/mi11050463
Date:
April, 2020
Fichier:
PDF, 2.89 MB
2020
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