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Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates
Barzaghi, Andrea, Firoozabadi, Saleh, Salvalaglio, Marco, Bergamaschini, Roberto, Ballabio, Andrea, Beyer, Andreas, Albani, Marco, Valente, Joao, Voigt, Axel, Paul, Douglas J., Miglio, Leo, MontalentiVolume:
20
Journal:
Crystal Growth & Design
DOI:
10.1021/acs.cgd.9b01312
Date:
May, 2020
Fichier:
PDF, 3.55 MB
2020