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Effect of Inductively Coupled Electro-Magnetic Field on Bottom Oxide Etch in a High Aspect Ratio Trench
Sardo, Stefano, Palombizio, Antonio, Mannarino, Manuel, Redolfi, Augusto, Haspeslagh, LucVolume:
97
Journal:
ECS Transactions
DOI:
10.1149/09703.0003ecst
Date:
May, 2020
Fichier:
PDF, 567 KB
2020