Density Functional Theory Study of Oxygen Adsorption on Polymer Surfaces for Atomic Layer Etching: Implications for Semiconductor Device Fabrication
Longo, Roberto C., Ranjan, Alok, Ventzek, Peter L. G.Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.0c00618
Date:
May, 2020
Fichier:
PDF, 15.86 MB
2020
File converter
Plus de résultats de recherche
More benefits 
