
[IEEE 2019 IEEE Albany Nanotechnology Symposium (ANS) - Albany, NY, USA (2019.11.12-2019.11.13)] 2019 IEEE Albany Nanotechnology Symposium (ANS) - Investigation of Quantification of Agglomeration Level of Silica Particles in CMP Slurry for Creating the Quality Prediction Formula by AI Technology
Kubota, Mami, Takanashi, Keiichi, Dunn, Kathleen A.Année:
2019
Langue:
english
DOI:
10.1109/ans47466.2019.8963738
Fichier:
PDF, 2.14 MB
english, 2019