Electrostatic metallic glass micro-mirror fabricated by the self-aligned structures
Wang, Zhao-Ying, Chen, Yu-Yen, Lin, Yu-Ching, ONO, Takahito, Lin, Ming-Tzer, Tsai, Yao-ChuanJournal:
Japanese Journal of Applied Physics
DOI:
10.35848/1347-4065/ab7477
Date:
February, 2020
Fichier:
PDF, 2.56 MB
2020
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