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Metal-assisted chemical etching for realisation of deep silicon microstructures
Zarei, Sanaz, Zahedinejad, Mohammad, Mohajerzadeh, ShamsVolume:
14
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2019.0113
Date:
September, 2019
Fichier:
PDF, 733 KB
2019