Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell
Yu, Yuanyu, Wang, Jiujiang, Liu, Xin, Pun, Sio Hang, Zhang, Shuang, Cheng, Ching-Hsiang, Lei, Kin Fong, Vai, Mang I, Mak, Peng UnVolume:
11
Langue:
english
Journal:
Micromachines
DOI:
10.3390/mi11020217
Date:
February, 2020
Fichier:
PDF, 12.59 MB
english, 2020
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