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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Aluminum Nitride Ion Production by a Magnetron Sputtering Type Ion Source with a Temperature Controlled Al Target
Sakamoto, Takeshi, Yoshioka, Kentaro, Kenmotsu, Takahiro, Wada, MotoiAnnée:
2018
Langue:
english
DOI:
10.1109/iit.2018.8807973
Fichier:
PDF, 3.69 MB
english, 2018