
Helium focused ion beam irradiation with subsequent chemical etching for the fabrication of nanostructures
Petrov, Yuri, Grigoryev, Evgeniy, Baraban, AlexanderLangue:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/ab6fe3
Date:
January, 2020
Fichier:
PDF, 1.32 MB
english, 2020