High‐Fidelity, Sub‐5 nm Patterns from High‐χ Block Copolymer Films with Vapor‐Deposited Ultrathin, Cross‐Linked Surface‐Modification Layers
Wang, Hyun Suk, Oh, Seula, Choi, Junhwan, Jang, Wontae, Kim, Ki Hyun, Arellano, Carlos Luis, Huh, June, Bang, Joona, Im, Sung GapLangue:
english
Journal:
Macromolecular Rapid Communications
DOI:
10.1002/marc.201900514
Date:
January, 2020
Fichier:
PDF, 1.65 MB
english, 2020