Effect of a change in phase of the reflected wave on measurements of the shape of a surface in optical profilometry
V. L. Minaev, K. E. LoshchilovVolume:
53
Langue:
english
Pages:
4
DOI:
10.1007/s11018-010-9576-9
Date:
November, 2010
Fichier:
PDF, 157 KB
english, 2010