Numerical simulation of optical profile restoration procedure with scattering of radiation by nanostructures
Ya. A. Ilyushin, A. G. Lomakin, S. Yu. Zolotarevskii, G. G. Levin, S. A. KononogovVolume:
53
Langue:
english
Pages:
6
DOI:
10.1007/s11018-010-9491-0
Date:
July, 2010
Fichier:
PDF, 308 KB
english, 2010