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Formation of large-area MoS 2 thin films by oxygen-catalyzed sulfurization of Mo thin films
Jo, Seong Soon, Li, Yifei, Singh, Akshay, Kumar, Abinash, Frisone, Sam, LeBeau, James M., Jaramillo, RafaelVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5132748
Date:
January, 2020
Fichier:
PDF, 2.24 MB
2020