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Evaluation of poly-Si thin film crystallized by solid green laser annealing using UV/visible Raman spectroscopy
Atsushi Ogura, Yasuto Kakemura, Daisuke Kosemura, Tetsuya Yoshida, Miyuki Masaki, Kenichirou Nishida, Ryusuke Kawakami, Naoya YamamotoVolume:
19
Langue:
english
Pages:
5
DOI:
10.1007/s10854-008-9650-0
Date:
December, 2008
Fichier:
PDF, 422 KB
english, 2008