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Germanium content dependence of the leakage current of recessed SiGe source/drain junctions
Eddy Roger Simoen, Mireia Bargallo Gonzalez, Geert Eneman, Peter Verheyen, Aldo Benedetti, Hugo Bender, Roger Loo, Cor ClaeysVolume:
18
Langue:
english
Pages:
5
DOI:
10.1007/s10854-006-9102-7
Date:
July, 2007
Fichier:
PDF, 255 KB
english, 2007