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Low Temperature Graphene Growth Effort on Corning Glass Substrate by Using VHF-IP HWC-PECVD
Yusuf, Momang A., Rosikhin, Ahmad, Malago, Jasruddin D., Noor, Fatimah A., Winata, TotoVolume:
966
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.966.100
Date:
August, 2019
Fichier:
PDF, 1.87 MB
2019