(Invited) Challenges of Graphene Process Integration in CMOS Technology
Lisker, Marco, Lukosius, Mindaugas, Lukose, Rasuole, Wenger, Christian, Mai, AndreasVolume:
92
Journal:
ECS Transactions
DOI:
10.1149/09204.0201ecst
Date:
July, 2019
Fichier:
PDF, 464 KB
2019