Langmuir probe diagnostics of an impulse magnetron discharge with hot Cr target
Tumarkin, A.V., Kaziev, A.V., Leonova, K.A., Kharkov, M.M., Kolodko, D.V., Khomyakov, A.Yu.Volume:
14
Journal:
Journal of Instrumentation
DOI:
10.1088/1748-0221/14/09/C09026
Date:
September, 2019
Fichier:
PDF, 4.69 MB
2019