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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Room Temperature Photoluminescence Characterization of Very Low Energy and Low Dose F + Implanted Silicon Wafers
Yoo, Woo Sik, Ishigaki, Toshikazu, Kim, Jung Gon, Kang, KitaekAnnée:
2018
DOI:
10.1109/iit.2018.8807982
Fichier:
PDF, 570 KB
2018