Validation of compact models of microcantilever actuators for RF-MEMS design
Eugenio Brusa, Mircea Gh. MunteanuVolume:
59
Langue:
english
Pages:
9
DOI:
10.1007/s10470-008-9253-y
Date:
May, 2009
Fichier:
PDF, 611 KB
english, 2009