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Analysis, testing and optimisation of electrostatic comb-drive levitational actuators
A. Molfese, A. Nannini, G. Pennelli, F. PieriVolume:
48
Langue:
english
Pages:
8
DOI:
10.1007/s10470-006-8119-4
Date:
July, 2006
Fichier:
PDF, 1.94 MB
english, 2006