MEMS-Based AlScN Resonating Energy Harvester With Solidified Powder Magnet
Yarar, Erdem, Meyners, Dirk, Quandt, Eckhard, Fichtner, Simon, Hayes, Patrick, Piorra, Andre, Reimer, Tim, Lisec, Thomas, Frank, Peter, Wagner, Bernhard, Lofink, FabianAnnée:
2019
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2945550
Fichier:
PDF, 26.16 MB
english, 2019
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