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Liftoff of single crystal diamond by epitaxial lateral overgrowth using SiO2 masks
Schreck, Matthias, Mayr, Michael, Weinl, Michael, Fischer, Martin, Gsell, StefanLangue:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2019.107606
Date:
October, 2019
Fichier:
PDF, 806 KB
english, 2019