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[IEEE 2019 IEEE Computer Society Annual Symposium on VLSI (ISVLSI) - Miami, FL, USA (2019.7.15-2019.7.17)] 2019 IEEE Computer Society Annual Symposium on VLSI (ISVLSI) - Minimization of Flare in EUVL by Simultaneous Wire Segment Perturbation and Dummification
Paul, Sudipta, Banerjee, Pritha, Sur-Kolay, SusmitaAnnée:
2019
Langue:
english
DOI:
10.1109/isvlsi.2019.00047
Fichier:
PDF, 243 KB
english, 2019