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A CMOS-Integrated MEMS Platform for Frequency Stable Resonators—Part II: Design and Analysis
Chen, Chao-Yu, Li, Ming-Huang, Li, Cheng-Syun, Li, Sheng-ShianVolume:
28
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2936146
Date:
October, 2019
Fichier:
PDF, 3.63 MB
english, 2019