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Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives
Xiao-Ying Li, Qian Jin, Da-Yong Qiao, Bao-Peng Kang, Bin Yan, Yao-Bo LiuVolume:
18
Langue:
english
Pages:
8
DOI:
10.1007/s00542-011-1384-x
Date:
March, 2012
Fichier:
PDF, 788 KB
english, 2012