Modeling of the intrinsic stress effect on the resonant frequency of NEMS resonators integrated by beams with variable cross-section
A. L. Herrera-May, L. A. Aguilera-Cortés, P. J. García-Ramírez, H. Plascencia-Mora, M. Torres-CisnerosVolume:
16
Langue:
english
Pages:
8
DOI:
10.1007/s00542-010-1134-5
Date:
December, 2010
Fichier:
PDF, 492 KB
english, 2010