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Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors
Ghader Rezazadeh, Faraz Khatami, Ahmadali TahmasebiVolume:
13
Langue:
english
Pages:
8
DOI:
10.1007/s00542-006-0362-1
Date:
April, 2007
Fichier:
PDF, 291 KB
english, 2007