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Branched hole drilling in silica glass by continuous-wave laser backside irradiation
Shun, Sato, Tokunaga, Daijiro, Hidai, Hirofumi, Matsusaka, Souta, Chiba, Akira, Morita, NoboruVolume:
60
Langue:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2019.07.021
Date:
November, 2019
Fichier:
PDF, 1.30 MB
english, 2019