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[IEEE 2019 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2019.3.18-2019.3.19)] 2019 China Semiconductor Technology International Conference (CSTIC) - Batch Atomic Layer Deposition of Aluminum Nitride for RF-MEMS and GAN Power-Devices
Zhu, Zhen, Ostreng, Erik, Tuoriniemi, Iiris, Chen, Zhenzi, Niiranen, Kalle, Sneck, SamiAnnée:
2019
Langue:
english
DOI:
10.1109/cstic.2019.8755779
Fichier:
PDF, 1.13 MB
english, 2019