[IEEE 2018 Joint 7th International Conference on Informatics, Electronics & Vision (ICIEV) and 2018 2nd International Conference on Imaging, Vision & Pattern Recognition (icIVPR) - Kitakyushu, Japan (2018.6.25-2018.6.29)] 2018 Joint 7th International Conference on Informatics, Electronics & Vision (ICIEV) and 2018 2nd International Conference on Imaging, Vision & Pattern Recognition (icIVPR) - Optimization of growth procedure for silicon oxinitride (Si4O5N3) single-layer on SiC(0001)
Kabiruzzaman, Md, Nakagawa, Takeshi, Mizuno, SeigiAnnée:
2018
Langue:
english
DOI:
10.1109/ICIEV.2018.8641044
Fichier:
PDF, 1.20 MB
english, 2018
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