
[IEEE 2018 IEEE International Frequency Control Symposium (IFCS) - Olympic Valley, CA (2018.5.21-2018.5.24)] 2018 IEEE International Frequency Control Symposium (IFCS) - Suspended Frame Structure with Phononic Crystals for Anchor Loss Reduction of MEMS Resonator
Bao, Fei-Hong, Awad, Mohammed, Li, Xin-Yi, Wu, Zhao-Hui, Bao, Jing-Fu, Zhang, Xiao-Sheng, Bao, Lei-LeiAnnée:
2018
Langue:
english
DOI:
10.1109/FCS.2018.8597503
Fichier:
PDF, 1.46 MB
english, 2018