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Spectroscopic Characterization of Silicon Wire‐Like and Porous Nanolayers in the Process of Metal‐Assisted Chemical Etching of c‐Si
Zharova, Yuliya, Ermina, Anna, Pavlov, Sergey, Koshtyal, Yury, Tolmachev, VladimirLangue:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201900318
Date:
July, 2019
Fichier:
PDF, 841 KB
english, 2019