High-SPL Air-coupled Piezoelectric Micromachined Ultrasonic Transducers based on 36% ScAlN Thin-film
Kusano, Yuri, Ishii, Itaru, Kamiya, Tatsuya, Teshigahara, Akihiko, Luo, Guo-Lun, Horsley, David A.Année:
2019
Langue:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/tuffc.2019.2921983
Fichier:
PDF, 825 KB
english, 2019