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Fabrication of 3D microstructures using grayscale lithography
Lima, Frederico, Khazi, Isman, Mescheder, Ulrich, Tungal, Alok C., Muthiah, UmaVolume:
8
Langue:
english
Journal:
Advanced Optical Technologies
DOI:
10.1515/aot-2019-0023
Date:
June, 2019
Fichier:
PDF, 1.68 MB
english, 2019