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Properties of ZnO thin films deposited by DC reactive magnetron sputtering under different plasma power
Dongping Zhang, Ping Fan, Xingmin Cai, Jianjun Huang, Lili Ru, Zhuanghao Zheng, Guangxing Liang, Yukun HuangVolume:
97
Langue:
english
Pages:
5
DOI:
10.1007/s00339-009-5234-y
Date:
November, 2009
Fichier:
PDF, 408 KB
english, 2009