Modeling and experimental characterization of an active MEMS based force sensor
Cailliez, Jonathan, Boudaoud, Mokrane, Mohand-Ousaid, Abdenbi, Weill–Duflos, Antoine, Haliyo, Sinan, Régnier, StéphaneJournal:
Journal of Micro-Bio Robotics
DOI:
10.1007/s12213-019-00115-1
Date:
March, 2019
Fichier:
PDF, 2.10 MB
2019
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