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Curvature-controllable and crack-free AlN/sapphire templates fabricated by sputtering and high-temperature annealing
Hayashi, Yusuke, Tanigawa, Kentaro, Uesugi, Kenjiro, Shojiki, Kanako, Miyake, HidetoVolume:
512
Langue:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2019.02.026
Date:
April, 2019
Fichier:
PDF, 655 KB
english, 2019