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Prediction of Material Removal Rate for Chemical Mechanical Planarization Using Decision Tree-Based Ensemble Learning
Li, Zhixiong, Wu, Dazhong, Yu, TianyuVolume:
141
Langue:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.4042051
Date:
January, 2019
Fichier:
PDF, 5.69 MB
english, 2019