Novel metallization processes for sub-100 nm magnetic tunnel junction devices
Cao, Kaihua, Cui, Hushan, Zhang, Youguang, Xiong, Huagang, Wei, Jiaqi, Wang, Lezhi, Cai, Wenlong, Liu, Yizheng, Liu, Pan, He, Xiaobin, Li, Junjie, Bai, Guobin, Yu, Jiahan, Han, Jianghao, Gao, JianfengLangue:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.01.010
Date:
February, 2019
Fichier:
PDF, 3.81 MB
english, 2019
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