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[IEEE 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Hangzhou (2018.8.13-2018.8.17)] 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - A Six-DOF Micro-/Nanopositioning System
Zhang, Defu, Chen, Huanan, Li, Pengzhi, Ni, Mingyang, Guo, Kang, Wang, Dongping, Wu, Zhihui, Zhang, Jianguo, Li, PengzhiAnnée:
2018
Langue:
english
DOI:
10.1109/3M-NANO.2018.8552167
Fichier:
PDF, 8 KB
english, 2018