Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges
You, K. H., Schulze, J., Derzsi, A., Donkó, Z., Yeom, H. J., Kim, J. H., Seong, D. J., Lee, Hyo-ChangVolume:
26
Langue:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5063543
Date:
January, 2019
Fichier:
PDF, 2.04 MB
english, 2019
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